- 與測量操作相關的配置集中設置在主機前面,大幅縮短了操作流程。
- 對X軸位置定位時,可在全測量範圍內通過電動飛梭輪粗微調整,輕鬆進行。
- 裝配了新開發的可以簡便快速垂直移動的台架(僅CV-2100M4裝配),Z 軸方向的測量高度可以輕鬆快速的接近或退避。
- 可根據用途選擇CV-2100M4/N4主機,選配數據處理裝置(筆記本或台式電腦)
規格:
Model No. | CV-2100M4 | CV-2100N4 | |
Measuring range | X axis | 100 mm | |
Z1 axis (detector unit) | 50 mm | ||
Z2-axis (column) travel range | 350 mm | — | |
X-axis inclination angle | ±45o | ||
Resolution | X axis | 0.1 µm | |
Z1 axis | 0.1 µm | ||
Drive method | X axis | Motor (0-20 mm/s) | |
Vertical travel (Z-axis column) | Manual (Quick-vertical-motion, fine) | — | |
Measuring speed | 0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0, 5.0 mm/s | ||
Straightness (when the X axis is horizontal) | 2.5 µm/100 mm | ||
Accuracy (20 oC) | X axis | ±(2.5+0.02L) µm L= Measurement Length (mm) | |
Z1 axis | ±(2.5+|0.1|) µm H= Measurement height from horizontal position within ±25 mm | ||
Measuring direction | Both pulling and pushing directions | ||
Measuring face direction | Downward direction | ||
Measuring force | 30±10 mN (3 gf) | ||
Traceable angle (using the standard stylus) | Ascent 77o, Descent 87o (according to surface property) | ||
External dimensions (WxDxH) | 745 x 450 x 885 mm | 651 x 143 x 138.5 mm | |
Mass | 145.8 kg | 5.8 kg |